Furnace Chamber Insulation Barrel SiC High Purity
PRODUCT DESCRIPTION
Recrystallized silicon carbide insulation barrel is a key component in high-end high-temperature industrial equipment, especially exhibiting irreplaceable advantages in high-temperature treatment processes in semiconductor, photovoltaic, special ceramics and other fields.The function of the furnace chamber insulation barrel is to protect the production environment of chip manufacturing - an ultra clean and ultra precision production environment.
Furnace chamber insulation barrel is composed of silicon nitride,is also known as silicon carbide insulation barrel. Silicon carbide insulation barrel ensures the "stability" of the environmental state, not the temperature. It maintains a constant, pure, and inert 'microclimate'.SiC insulation barrel are cutting-edge high-tech containers that protect wafers worth millions of dollars and ensure chip yield. SiC insulation barrel is essential components in chip manufacturing.
Characteristics of RSiC Insulation Barrel
1、Ultra high temperature stability: temperature resistance limit, long-term use temperature can reach 1600 ℃, short-term tolerance 1800 ℃.
2、High temperature strength retention: The compressive strength at 1500 ℃ of silicon carbide insulation barrel is greater than 100MPa, while the strength of alumina insulation material decays by more than 50% at the same temperature.
3、Ultimate thermal efficiency: SiC insulation barrel has low thermal conductivity: 0.8-1.2 W/(m · K) (at 800 ℃), reduced by 40% compared to ordinary silicon carbide materials, achieved through a special pore structure design. Multi layer reflective structure: using RSiC material, with high radiation heat reflectivity
4、Chemical inertness: Corrosion resistance: SiC insulation barrel can resist acidic gases such as HCI, HF, H2SO4 vapor, alkaline environment such as Na2CO3 molten salt, and metal melts such as Al, Cu, Ag, etc;
5、SiC insulation barrel has a long service life.
FEATURES & BENEFITS
· High temperature resistance
· Thermal shock resistance
· High thermal conductivity
· High mechanical strength
· Acid and alkali resistance
· Wear resistance
MAIN PARAMETER
High Temperature Kiln Equipment Industry | RSiC |
SiC Content (%) | ≥99% |
Bulk Density (g/cm3) | 2.65~2.75 |
Apparent Porosity (%) | <17 |
Room temperaturestrength (MPa) | 90~100 |
Strengthat 1300℃(MPa) | 100-110 |
Elasticity modulus at 20℃ | 240 |
Thermal Conductivity At 1200℃(W/mk) | 36 |
Thermal Expansion x10-6/℃ | 4.6 |
Max Using Temperature（℃） | 1650℃ |
Hardness At 20°C (Kg/mm2) | 2000 |
Fracture Toughness At 20°(MpaxM1/2) | 2.0 |
PRODUCT DETAIL
The insulation cylinder has ultra-high purity: the purity of the sintered body is above 3N, and the processing accuracy can reach 0.01mm.
PACKING
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