Semiconductors and photovoltaics

Semiconductor furnace tube(such as those used in diffusion furnaces, oxidation furnaces, etc.) must meet strict requirements such as ultra-high purity, high temperature stability, and thermal shock resistance. RSiC furnace tube has become a mainstream material due to its excellent properties. The purity of the sintered body is above 3N, and the processing accuracy is 0.01mm.

The RSiC wafer carrier serves as a critical component in semiconductor manufacturing and crystal growth processes, specifically designed to carry silicon wafers or silicon carbide substrates in high-temperature environments. This essential 12-inch wafer carrier provides reliable support during various thermal processing stages.

Silicon nitride bonded silicon carbide (NSiC) thermocouple protection tube is a key component in the field of high-temperature measurement. NSiC thermocouple protection tube exhibits excellent performance in extreme environments that require high temperature strength, wear resistance, and thermal stability.

Furnace chamber insulation barrel is a key thermal field component used in semiconductor manufacturing processes such as monocrystalline silicon growth and wafer heat treatment. Insulation barrel must meet the requirements of extreme high temperature, high purity, and excellent thermal insulation。

Furnace thermal shield plate is the core components of high-temperature semiconductor, photovoltaic. RSiC thermal shield plate new material sintering equipment. RSiC thermal shield plate has the characteristics of high temperature resistance, low heat loss, and long service life.

Recrystallized silicon carbide cantilever paddle is a high-performance ceramic component, mainly used in industries such as chemical, metallurgical, environmental protection, and semiconductor due to its superior high temperature resistance, corrosion resistance, wear resistance, and good thermal shock stability.

SiC wafer boat is a key carrier in semiconductor manufacturing and crystal growth processes, mainly used to carry silicon wafers or silicon carbide substrates in high-temperature environments. Silicon carbide wafer boat has advantages such as high purity, high temperature resistance (above 1600 ° C), acid and alkali corrosion resistance, low thermal expansion coefficient, and high thermal conductivity.

RSiC wafer boat is a key carrier in semiconductor manufacturing and crystal growth processes, mainly used to carry silicon wafers or silicon carbide substrates in high-temperature environments. Horizontal wafer boats are used in horizontal diffusion furnaces.

RSiC wafer carrier is a key carrier in semiconductor manufacturing and crystal growth processes, mainly used to carry silicon wafers or silicon carbide substrates in high-temperature environments. Semiconducting wafer carrier has advantages such as high purity, high temperature resistance (above 1600 ° C), acid and alkali corrosion resistance, low thermal expansion coefficient, and high thermal conductivity.

RSiC furnace tube:Recrystallized silicon carbide furnace tube is a key component in semiconductor manufacturing equipment, mainly used in high-temperature process chambers (such as epitaxial growth, ion implantation, diffusion furnace, etc.). The sintered body purity is above 3N, and the processing accuracy can reach 0.01mm, meeting the requirements of ultra-high purity, corrosion resistance, and precision size.

RSiC wafer boat is a critical component in semiconductor manufacturing, designed to safely secure wafers during high-temperature processes. RSiC wafer boats have high temperature resistance, excellent thermal shock resistance, excellent acid and alkali corrosion resistance, high purity, and structural stability.

Recrystallized silicon carbide (RSiC) thermocouple protection tube is a key component in the field of high-temperature measurement. RSiC thermocouple tube exhibits excellent performance in extreme environments that require high temperature strength, wear resistance, and thermal stability.