12-Inch Three-column Wafer Carrier RSiC Semiconducting Trays
In the semiconductor industry, the 12-inch wafer carrier plays a critical role within 12-inch (300mm) silicon-based chip production lines. This RSiC wafer carrier serves as a high-performance consumable component integrated into existing 12-inch silicon process equipment, particularly in vertical diffusion furnaces. Manufactured from high-purity silicon carbide, this advanced recrystallized silicon carbide wafer carrier delivers exceptional performance characteristics:
1.Exceptional High-Temperature Strength: The 12-inch wafer carrier maintains mechanical integrity even at temperatures exceeding 1650°C, preventing deformation while safely supporting heavy 12-inch wafers.
2. Superior Thermal Stability and Shock Resistance: The RSiC wafer carrier withstands extremely rapid heating and cooling cycles without cracking, significantly shortening process cycles and enhancing production capacity.
3.Ultra-High Purity and Low Contamination: This recrystallized silicon carbide wafer carrier contains minimal metal impurities, less contamination than quartz, making it ideal for impurity-sensitive advanced processes.
4.High Thermal Conductivity: The 12-inch wafer carrier promotes uniform temperature distribution within the furnace tube, improving process consistency.
Our manufacturing capabilities include tile carriers, three-column wafer carriers, and four-column carriers. These RSiC wafer carrier solutions are widely applied in semiconductor and photovoltaic industries, particularly suitable for oxidation and ion implantation processes with smaller wafer sizes.
MATERIAL TECHNICAL PARAMETERS
Semiconductor/Photovoltaic Industries | RSiC |
SiC Purity (%) | 99.9-99.99 |
Bulk Density (g/cm3) | 2.65-2.75 |
Apparent Porosity (%) | 15-16 |
Room Temperature Strength (MPa) | 90 |
Strength At 1300℃(MPa) | 100 |
Connection Strength Of Sintered Body(MPa) | 25 |
PRODUCT DETAIL
Recrystallized Silicon Carbide Wafer Carrier
The recrystallized silicon carbide wafer carrier is manufactured using high-purity silicon carbide substrate through recrystallization sintering technology. This RSiC wafer carrier integrates with precision-machined teeth and grooves, resulting in smooth, burr-free surfaces.
Specifically designed for manufacturing sectors requiring extreme cleanliness and stability - including semiconductors, photovoltaics, and LEDs - the primary function of this 12-inch wafer carrier is to safely and stably support silicon wafers. This advanced RSiC wafer carrier is widely implemented in critical processes such as chemical vapor deposition (CVD), thermal diffusion, and high-temperature annealing.
PACKING
OUR SERVICE
Riseport Global Traders Ltd.(Shenyang) provide OEM and ODM services, quality control throughout the entire process, real-time order progress feedback, professional technical consultation, and quick response to after-sales issues. We also offer customized international logistics solutions to empower customers with technological upgrades and supply chain optimization, ensuring worry free global customers from procurement to application.
