RSiC furnace tube:Recrystallized silicon carbide furnace tube is a key component in semiconductor manufacturing equipment, mainly used in high-temperature process chambers (such as epitaxial growth, ion implantation, diffusion furnace, etc.). The sintered body purity is above 3N, and the processing accuracy can reach 0.01mm, meeting the requirements of ultra-high purity, corrosion resistance, and precision size.
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