Semiconductor High Purity RSiC Furnace Tube
PRODUCT DESCRIPTION
The semiconductor furnace, a cornerstone of modern chip manufacturing, relies on a critical core component: the RSiC furnace tube. This high-purity silicon carbide furnace tube serves as the heart of vertical or horizontal diffusion and oxidation furnaces. Within this tube, wafers on specialized carriers undergo precise high-temperature processes under controlled atmospheres. As an indispensable high-temperature platform, the RSiC furnace tube is central to key semiconductor processes including thermal oxidation, diffusion, LPCVD, and annealing, delivering unmatched uniformity, stability, and production capacity.
Characteristics of RSiC Furnace Tube
The application of silicon carbide materials in high-temperature semiconductor equipment brings several critical advantages:
Exceptional High-Temperature Stability: Capable of prolonged operation in environments exceeding 1600°C, with short-term tolerance up to 1800°C.
Superior Thermal Shock Resistance: The combination of high thermal conductivity and a low coefficient of thermal expansion allows silicon carbide furnace tube to withstand rapid heating and cooling cycles without damage.
Outstanding Chemical Inertness: Exhibits excellent resistance to corrosion from acids, alkalis, and various process gases, ensuring process purity.
High Mechanical Strength & Hardness: Maintains structural integrity and resists deformation under high thermal and mechanical loads, ensuring long-term durability.
Uniform Thermal Field Distribution: Engineered to maintain an extremely consistent temperature profile, with minimal wall gradient, which is crucial for process uniformity across all wafers.
FEATURES & BENEFITS
Extreme Temperature Resistance: Guarantees performance and longevity in the most demanding thermal processes.
Rapid Thermal Cycling Capability: The robust RSiC furnace tube can handle aggressive heating and cooling rates, boosting productivity and reducing cycle times.
High Thermal Conductivity: Ensures efficient heat transfer and a stable, uniform thermal environment within the silicon carbide furnace tube.
Superior Structural Integrity: Provides reliable, sag-free support for wafer boats over extended service life.
Excellent Corrosion & Wear Resistance: Protects against aggressive process chemicals and atmospheric erosion, minimizing particle generation and contamination.
MAIN PARAMETER
High Temperature Kiln Equipment Industry | RSiC |
SiC Content (%) | ≥99% |
Bulk Density (g/cm3) | 2.65~2.75 |
Apparent Porosity (%) | <17 |
Room temperature strength (MPa) | 90~100 |
Strengthat 1300℃(MPa) | 100-110 |
Elasticity modulus at 20℃ | 240 |
Thermal Conductivity At 1200℃(W/mk) | 36 |
Thermal Expansion x10-6/℃ | 4.6 |
Max Using Temperature（℃） | 1650℃ |
Hardness At 20°C (Kg/mm2) | 2000 |
Fracture Toughness At 20°(MpaxM1/2) | 2.0 |
PRODUCT DETAIL
In semiconductor fabrication, the RSiC furnace tube is the core vessel within high-temperature equipment. This high-purity silicon carbide furnace tube creates a sealed, uniform, and contaminant-free environment essential for wafer processing.
Primary Functions:
To house wafers (loaded on wafer boats) and facilitate critical high-temperature steps such as diffusion, oxidation, annealing, and thin-film deposition.
To provide a hermetic enclosure, RSiC furnace tube allows for precise control over the flow and distribution of reactive gases (e.g., O₂, N₂).
The exceptional properties of the RSiC furnace tube ensure process consistency, maximize yield, and are fundamental to the production of advanced semiconductor devices.
PACKING
OUR ADVANTAGE
Riseport Global Traders Ltd.(Shenyang) focuses on silicon carbide (SiC) products and has built a cross-border trade service model for the entire SiC industry chain through resource integration. It has a competitive advantage in covering differentiated aspects of the entire industry chain, integrating raw material supply, product customization, and other links. Through centralized procurement, it reduces marginal costs and achieves rapid response, improving efficiency and saving costs for buyers. It provides customized product services to meet different customer needs, matching logistics, customs, settlement, and other links, and providing full process and convenient services.
