Semiconductor furnace tube(such as those used in diffusion furnaces, oxidation furnaces, etc.) must meet strict requirements such as ultra-high purity, high temperature stability, and thermal shock resistance. RSiC furnace tube has become a mainstream material due to its excellent properties. The purity of the sintered body is above 3N, and the processing accuracy is 0.01mm.
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RSiC furnace tube:Recrystallized silicon carbide furnace tube is a key component in semiconductor manufacturing equipment, mainly used in high-temperature process chambers (such as epitaxial growth, ion implantation, diffusion furnace, etc.). The sintered body purity is above 3N, and the processing accuracy can reach 0.01mm, meeting the requirements of ultra-high purity, corrosion resistance, and precision size.
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