Process Tube/RSiC furnace tube High Purity Thin-walled
PRODUCT DESCRIPTION
In high-temperature equipment for semiconductor and photovoltaic manufacturing, such as diffusion furnaces, CVD furnaces, annealing furnaces, etc., the RSiC furnace tube is a key auxiliary component installed inside or outside the main process tube, and the role of the process tube goes far beyond simple physical protection.
Furnace tubes can prevent metal contamination, ensuring pollution control and purity during the process;
Protect the main process tube and extend the service life of the equipment.
RSiC furnace tube have significant advantages in high-end manufacturing fields such as semiconductors, photovoltaics, and third-generation semiconductors, in high temperature, corrosive, and high-purity processes.
Characteristics of RSiC Furnace Tube
1、Extreme high temperature performance：temperature up to 1600 ℃, far exceeding quartz process tube (1200 ℃ limit) and ordinary ceramic process tube;
2、Excellent thermal shock resistance: process tube can withstand rapid temperature rise and fall of 1000 ℃/min;
3、Super strong chemical inertness: resistant to corrosive gases such as HCl, Cl ₂, HF, etc.;
4、Ultra high purity and low pollution: metal impurity content<1 ppm;
5、Long lifespan: Strong anti sedimentation ability and low maintenance cost;
6、Optimization of thermal field uniformity: RSiC furnace tube have high thermal conductivity, rapid homogenization, and reduction of axial temperature difference in the furnace (controllable within ± 0.3 ℃).
MAIN PARAMETER
High Temperature Kiln Equipment Industry | RSiC |
SiC Content (%) | ≥99% |
Bulk Density (g/cm3) | 2.65~2.75 |
Apparent Porosity (%) | <17 |
Room temperature strength (MPa) | 90~100 |
Strengthat 1300℃(MPa) | 100-110 |
Elasticity modulus at 20℃ | 240 |
Thermal Conductivity At 1200℃(W/mk) | 36 |
Thermal Expansion x10-6/℃ | 4.6 |
Max Using Temperature（℃） | 1650℃ |
Hardness At 20°C (Kg/mm2) | 2000 |
Fracture Toughness At 20°(MpaxM1/2) | 2.0 |
PRODUCT DETAIL
RSiC furnace tube/process tube, the purity of the sintered body is above 3N, and the processing accuracy of the process tube is 0.01mm.
PACKING
ABOUT US
As a trading enterprise specializing in the full industry chain services of silicon carbide (SiC), Riseport Global Traders Ltd.(Shenyang) has significant advantages in foreign trade platform in terms of business model and value chain. The enterprise has the ability to integrate the industrial chain: upstream: connecting with leading domestic silicon carbide production enterprises, covering the full range of raw materials, products (abrasives, ceramic parts), and semiconductor devices (wafers, power modules). Downstream: Serving international buyers, providing customized services, and offering one-stop procurement solutions. Provide high-quality services for procurement, logistics, customs clearance, cross-border settlement, etc.
