Long Tooth 8-Inch Wafer Boat RSiC High Purity
The 8-inch wafer boat is a specialized carrier device manufactured from recrystallized silicon carbide (RSiC), specifically engineered for 200mm wafer processing. This 8-inch wafer boat features a unique long-tooth design that significantly enhances heat dissipation efficiency while supporting higher-density multi-chip integration. The RSiC wafer boat demonstrates exceptional performance characteristics including high-temperature resistance, corrosion immunity, superior mechanical strength, and excellent semiconductor properties, making the RSiC wafer boat indispensable in integrated circuit manufacturing, LED production, and other microelectronic applications.
This 8-inch wafer boat maintains minimal contamination levels and precise manufacturing tolerances, providing reliable support for high-temperature semiconductor preparation processes. Our company manufactures various configurations including tile-style boats, three-column and four-column structures, available in 6-inch/8-inch/12-inch specifications, RSiC wafer boat is extensively applied in semiconductor and photovoltaic fields - particularly suitable for oxidation and ion implantation processes of smaller-sized wafers.
MATERIAL TECHNICAL PARAMETERS
Semiconductor/Photovoltaic Industries | RSiC |
SiC Purity (%) | 99.9-99.99 |
Bulk Density (g/cm3) | 2.65-2.75 |
Apparentporosity (%) | 15-16 |
Room temperature strength (MPa) | 90 |
Strength at1300℃ (MPa) | 100 |
Connection Strength Ofsintered body(MPa) | 25 |
PRODUCT DETAIL
The RSiC wafer boat represents a premium-grade carrier solution specifically designed for 200mm (8-inch) wafers, widely implemented in critical semiconductor thermal processes including diffusion and oxidation stages. This advanced 8-inch wafer boat utilizes recrystallized silicon carbide as its base material, enhanced with a silicon carbide coating applied through chemical vapor deposition (CVD) technology - 8-inch wafer boat effectively combining structural integrity with superior surface protection.
The RSiC wafer boat maintains perfect thermal expansion compatibility between substrate and coating, eliminating risks of cracking or delamination.
The RSiC wafer boat demonstrates remarkable thermal stability derived from silicon carbide's inherent high melting point and chemical inertness, maintaining consistent structural integrity and performance at processing temperatures exceeding 1250°C without softening, deformation, or environmental contamination. With typical service life spanning 2-3 years, this 8-inch wafer boat substantially reduces replacement frequency and maintenance costs, thereby minimizing equipment downtime and enhancing production economics.
PACKING
ABOUT US
Riseport Global Traders Ltd. (Shenyang) delivers value to a global clientele by combining efficient production with tailored services. Our advanced production system ensures high-quality output and rapid responsiveness. We are dedicated to providing personalized solutions and seamless, high-quality service to customers worldwide.ensures a seamless client experience through our 24h global service, guaranteeing timely responses across all time zones.
