6-Inch Wafer Boat SiC Semiconductor High Hardness
Silicon carbide wafer boat has multiple significant advantages, making SiC wafer boat outstanding in harsh environments such as high temperature, high cleanliness, and strong corrosion.
Silicon carbide wafer boat has high thermal stability. The long-term working temperature of SiC wafer boat can reach 1350℃~1650℃, which can meet the requirements of mainstream semiconductor processes such as chemical vapor deposition (CVD), diffusion, annealing, etc; SiC wafer boat will not soften or deform at 1700 ℃ for a short period of time.SiC wafer boat is suitable for higher-level equipment such as silicon carbide single wafer furnaces.
Silicon carbide wafer boat has a low coefficient of thermal expansion and excellent thermal shock stability, which can withstand rapid temperature changes and reduce structural cracking caused by thermal stress. Even in complex high-temperature atmospheres，silicon carbide wafer boat can still maintain good morphology and performance.
SiC wafer boats have extremely high surface cleanliness and low pollution characteristics. The material has high purity and extremely low metal impurity content, which can avoid secondary pollution to silicon wafers; The surface roughness Ra can be controlled below 0.1μm, meeting the stringent requirements of advanced processes for cleanliness levels.
In addition, SiC wafer boat customization achieves burr free and undamaged tooth grooves, and can be customized in various sizes such as 4-inch wafer boat, 6-inch wafer boat, 8-inch wafer boat, 12-inch wafer boat, etc.
Finally, SiC wafer boat structure has high strength and long service life, with an average lifespan 5-10 times longer than traditional quartz boats, significantly reducing equipment changeover frequency and overall ownership costs.
MATERIAL TECHNICAL PARAMETERS
Semiconductor/Photovoltaic Industries | RSiC |
SiC Purity (%) | 99.9-99.99 |
Bulk Density (g/cm3) | 2.65-2.75 |
Apparent Porosity (%) | 15-16 |
Room Temperature Strength (MPa) | 90 |
Strength At 1300℃(MPa) | 100 |
Connection Strength Of Sintered Body(MPa) | 25 |
PRODUCT DETAIL
This product is a 6-inch wafer boat, The diameter is 150mm, used to carry the corresponding 6-inch wafer. The number of wafers that a 6-inch wafer boat can accommodate is usually between 25 and 100.
Compared with quartz materials, 6-inch wafer boats have various characteristics of silicon carbide ceramics.6-inch wafer boat is not easy to produce bending stress deformation and thermal strain, and can adapt to the harsh reaction environment of strong corrosion and ultra-high temperature in wafer manufacturing joints. Silicon carbide ceramic is the best material for wafer boats and 6-inch wafer boat is also an emerging product in the wafer boat market.
PACKING
ABOUT US
Riseport Global Traders Ltd. (Shenyang) is an industry-trade integrated enterprise specializing in customized silicon carbide solutions. We provide comprehensive OEM and ODM services, delivering tailor-made kiln furniture through dimensional customization and technical design. Supported by sample validation and stringent quality standards, we ensure reliable performance for diverse production requirements.
